A laterally-driven micromachined inertial switch with a compliant cantilever beam as the stationary electrode for prolonging contact time
Chen, Wenguo; Wang, Yan; Wang, Yongliang; Zhu, Bin; Ding, Guifu; Wang, Hong; Zhao, Xiaolin; Yang, Zhuoqing
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Chen, Wenguo; Wang, Yan; Wang, Yongliang; Zhu, Bin; Ding, Guifu; Wang, Hong; Zhao, Xiaolin; Yang, Zhuoqing
- 卷第24卷
- 期第6期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小2906.02KB
- 发表时间2014-06-01
- DOI10.1088/0960-1317/24/6/065020