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Nanotribological behavior of ZnO films prepared by atomic layer deposition

Wang, Wun-Kai; Wen, Hua-Chiang; Cheng, Chun-Hu; Chou, Wu-Ching; Yau, Wei-Hung; Hung, Ching-Hua; Chou, Chang-Pin

期刊名称Journal of Physics and Chemistry of Solids
作者Wang, Wun-Kai; Wen, Hua-Chiang; Cheng, Chun-Hu; Chou, Wu-Ching; Yau, Wei-Hung; Hung, Ching-Hua; Chou, Chang-Pin
卷第75卷
期第3期
印刷ISSN0022-3697
文件大小2045.18KB
发表时间2014-3
DOI10.1016/j.jpcs.2013.09.016
页码334-338