Spectroscopic ellipsometry — Past, present, and future
- 期刊名称Thin Solid Films
- 作者Aspnes, D.E.
- 卷第571卷
- 印刷ISSN0040-6090
- 文件大小1050.08KB
- 发表时间2014-11
- DOI10.1016/j.tsf.2014.03.056
- 页码334-344
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