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Effect of annealing on the electrical properties of insulating aluminum nitride in MIM and MIS structures

Effect of annealing on the electrical properties of insulating aluminum nitride in MIM and MIS structures

Ortiz, Carlos R.; Pantojas, Victor M.; Otaño-Rivera, Wilfredo
  • 期刊名称Solid-State Electronics
  • 作者Ortiz, Carlos R.; Pantojas, Victor M.; Otaño-Rivera, Wilfredo
  • 卷第91卷
  • 印刷ISSN0038-1101
  • 文件大小919.23KB
  • 发表时间2014-1
  • DOI10.1016/j.sse.2013.10.013
  • 页码106-111
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