Influences of rapid thermal process on solution-deposited Ti-silicate/Si films: Phase segregation, composition and interface changes, and dielectric properties

Lee, Seung Muk; Hwang, Soo Min; Hwang, Soon Yong; Kim, Tae Woong; Lee, Sang Hyub; Park, Geun Chul; Choi, Ju Yun; Yoon, Jae Jin; Kim, Tae Jung; Kim, Young Dong; Kim, Hyoungsub; Lim, Jun Hyung; Joo, Jinho

期刊名称Materials Chemistry and Physics
作者Lee, Seung Muk; Hwang, Soo Min; Hwang, Soon Yong; Kim, Tae Woong; Lee, Sang Hyub; Park, Geun Chul; Choi, Ju Yun; Yoon, Jae Jin; Kim, Tae Jung; Kim, Young Dong; Kim, Hyoungsub; Lim, Jun Hyung; Joo, Jinho
卷第145卷
印刷ISSN0254-0584
文件大小1479.57KB
发表时间2014-05
DOI10.1016/j.matchemphys.2014.01.055
页码168-175

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Influences of rapid thermal process on solution-deposited Ti-silicate/Si films: Phase segregation, composition and interface changes, and dielectric properties