Structuring of DLC:Ag nanocomposite thin films employing plasma chemical etching and ion sputtering

Tamulevičius, Tomas; Tamulevičienė, Asta; Virganavičius, Dainius; Vasiliauskas, Andrius; Kopustinskas, Vitoldas; Meškinis, Šarūnas; Tamulevičius, Sigitas

期刊名称Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
作者Tamulevičius, Tomas; Tamulevičienė, Asta; Virganavičius, Dainius; Vasiliauskas, Andrius; Kopustinskas, Vitoldas; Meškinis, Šarūnas; Tamulevičius, Sigitas
卷第341卷
印刷ISSN0168-583X
文件大小2060.07KB
发表时间2014-12
DOI10.1016/j.nimb.2013.09.052
页码1-6

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Structuring of DLC:Ag nanocomposite thin films employing plasma chemical etching and ion sputtering