High Quality AlN Thin Films Deposited by Middle-Frequency Magnetron Sputtering at Room Temperature
- 期刊名称Materials Science Forum
- 作者Li, Chuan; Shu, Lin; He, Li Jun; Liu, Xing Zhao
- 卷第787卷
- 电子ISSN1662-9752
- 文件大小672.05KB
- 发表时间2014-4
- DOI10.4028/www.scientific.net/MSF.787.227
- 页码227-231
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