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Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties

Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties

Stoeckel, C.; Kaufmann, C.; Hahn, R.; Schulze, R.; Billep, D.; Gessner, T.

期刊名称Journal of Applied Physics
作者Stoeckel, C.; Kaufmann, C.; Hahn, R.; Schulze, R.; Billep, D.; Gessner, T.
卷第116卷
期第3期
印刷ISSN0021-8979
电子ISSN1089-7550
文件大小1216.91KB
发表时间2014-07-21
DOI10.1063/1.4887799

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