Basal Plane Dislocations from Inclusions in 4H-SiC Epitaxy
Stahlbush, Robert E.; Mahadik, Nadeemullah A.; O'Loughlin, Michael J.
- 期刊名称Materials Science Forum
- 作者Stahlbush, Robert E.; Mahadik, Nadeemullah A.; O'Loughlin, Michael J.
- 电子ISSN1662-9752
- 文件大小1912.89KB
- 发表时间2014-2
- DOI10.4028/www.scientific.net/MSF.778-780.309
- 页码309-312