[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - 3-D hemispherical micro glass-shell resonator with integrated electrostatic excitation and capacitive detection transducers
- 作者Rahman, Md Mahbubur; Xie, Yan; Mastrangelo, Carlos; Kim, Hanseup
- 文件大小3051.61KB
- 发表时间2014
- DOI10.1109/memsys.2014.6765730
- 页码672-675
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