Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators
- 期刊名称Journal of Applied Physics
- 作者Feng, Duan; Xu, Dehui; Wu, Guoqiang; Xiong, Bin; Wang, Yuelin
- 卷第115卷
- 期第2期
- 印刷ISSN0021-8979
- 电子ISSN1089-7550
- 文件大小1574.89KB
- 发表时间2014-01-14
- DOI10.1063/1.4861409
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