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Self-aligned Ni-GaSb source/drain junctions for GaSb p-channel metal-oxide-semiconductor field-effect transistors

Yokoyama, Masafumi; Nishi, Koichi; Kim, Sanghyeon; Yokoyama, Haruki; Takenaka, Mitsuru; Takagi, Shinichi

期刊名称Applied Physics Letters
作者Yokoyama, Masafumi; Nishi, Koichi; Kim, Sanghyeon; Yokoyama, Haruki; Takenaka, Mitsuru; Takagi, Shinichi
卷第104卷
期第9期
印刷ISSN0003-6951
电子ISSN1077-3118
文件大小1108.17KB
发表时间2014-03-03
DOI10.1063/1.4867262