Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition

Fainer, N. I.; Plekhanov, A. G.; Rumyantsev, Yu. M.; Maximovskii, E. A.; Shayapov, V. R.; Plekhanov, A. G.; Rumyantsev, Yu. M.; Maximovskii, E. A.; Shayapov, V. R.

期刊名称Glass Physics and Chemistry
作者Fainer, N. I.; Plekhanov, A. G.; Rumyantsev, Yu. M.; Maximovskii, E. A.; Shayapov, V. R.; Plekhanov, A. G.; Rumyantsev, Yu. M.; Maximovskii, E. A.; Shayapov, V. R.
卷第40卷
期第5期
印刷ISSN1087-6596
电子ISSN1608-313X
文件大小381.30KB
发表时间2014-9
DOI10.1134/S1087659614050034
页码570-577

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Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition