Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials
- 期刊名称IEEE Transactions on Instrumentation and Measurement
- 作者Trigona, Carlo; Ando, Bruno; Baglio, Salvatore
- 卷第63卷
- 期第3期
- 印刷ISSN0018-9456
- 电子ISSN1557-9662
- 文件大小1060.99KB
- 发表时间2014-03
- DOI10.1109/tim.2013.2277534
- 页码702-710
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