Atomic force microscopy deep trench and sidewall imaging with an optical fiber probe
- 期刊名称Review of Scientific Instruments
- 作者Xie, Hui; Hussain, Danish; Yang, Feng; Sun, Lining
- 卷第85卷
- 期第12期
- 印刷ISSN0034-6748
- 电子ISSN1089-7623
- 文件大小2335.91KB
- 发表时间2014-12
- DOI10.1063/1.4903466
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