![SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MEMS Adaptive Optics VII - A continuous single-crystal-silicon membrane deformable mirror using bimorph spring]()
SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MEMS Adaptive Optics VII - A continuous single-crystal-silicon membrane deformable mirror using bimorph springWu, Tong; Sasaki, Takashi; Akiyama, Masayuki; Hane, Kazuhiro; Olivier, Scot S.; Bifano, Thomas G.; Kubby, Joel · 2013