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Nanomechanical Properties of Standard and Strained SOI Films Fabricated by Wafer Bonding and Layer Splitting

Nanomechanical Properties of Standard and Strained SOI Films Fabricated by Wafer Bonding and Layer Splitting

Mamun, M. A.; Zhang, K.; Baumgart, H.; Elmustafa, A. A.

期刊名称ECS Transactions
作者Mamun, M. A.; Zhang, K.; Baumgart, H.; Elmustafa, A. A.
卷第64卷
期第5期
印刷ISSN1938-6737
电子ISSN1938-5862
文件大小179.32KB
发表时间2014-08-14
DOI10.1149/06405.0027ecst
页码27-32

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