Modeling and Analysis of a New Cylindrical Magnetic Levitation Gravity Compensator with Low Stiffness for the 6-DOF Fine Stage
- 期刊名称IEEE Transactions on Industrial Electronics
- 作者Zhang, He; Kou, Baoquan; Jin, Yinxi; Zhang, Hailin
- 印刷ISSN0278-0046
- 电子ISSN1557-9948
- 文件大小898.12KB
- 发表时间2014
- DOI10.1109/tie.2014.2365754
- 页码1-1