Ultrahigh-Voltage (> 20 kV) SiC PiN Diodes with a Space-Modulated JTE and Lifetime Enhancement Process via Thermal Oxidation
Kaji, Naoki; Niwa, Hiroki; Suda, Jun; Kimoto, Tsunenobu
- 期刊名称Materials Science Forum
- 作者Kaji, Naoki; Niwa, Hiroki; Suda, Jun; Kimoto, Tsunenobu
- 电子ISSN1662-9752
- 文件大小389.18KB
- 发表时间2014-2
- DOI10.4028/www.scientific.net/MSF.778-780.832
- 页码832-835