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Revisiting the Thermochemical Database of Si-C-H System Related to SiC CVD Modeling

Revisiting the Thermochemical Database of Si-C-H System Related to SiC CVD Modeling

Sukkaew, Pitsiri; Ojamäe, Lars; Danielsson, Örjan; Kordina, Olof; Janzén, Erik
  • 期刊名称Materials Science Forum
  • 作者Sukkaew, Pitsiri; Ojamäe, Lars; Danielsson, Örjan; Kordina, Olof; Janzén, Erik
  • 电子ISSN1662-9752
  • 文件大小406.92KB
  • 发表时间2014-2
  • DOI10.4028/www.scientific.net/MSF.778-780.175
  • 页码175-178
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