Revisiting the Thermochemical Database of Si-C-H System Related to SiC CVD Modeling
Sukkaew, Pitsiri; Ojamäe, Lars; Danielsson, Örjan; Kordina, Olof; Janzén, Erik
- 期刊名称Materials Science Forum
- 作者Sukkaew, Pitsiri; Ojamäe, Lars; Danielsson, Örjan; Kordina, Olof; Janzén, Erik
- 电子ISSN1662-9752
- 文件大小406.92KB
- 发表时间2014-2
- DOI10.4028/www.scientific.net/MSF.778-780.175
- 页码175-178