Towards a better understanding of the electrical contact formation process of the metal contact for DC MEMS/NEMS switches with statistical means
- 期刊名称Japanese Journal of Applied Physics
- 作者Qiu, Haodong; Wang, Hong; Ke, Feixiang
- 卷第53卷
- 期第8期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小506.86KB
- 发表时间2014-08-01
- DOI10.7567/JJAP.53.087201
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