SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] MOEMS and Miniaturized Systems XIII - Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application
Piyawattanametha, Wibool; Park, Yong-Hwa; Hofmann, Ulrich; Senger, Frank; Janes, Joachim; Mallas, Christian; Stenchly, Vanessa; von Wantoch, Thomas; Quenzer, Hans-Joachim; Weiss, Manfred
- 作者Piyawattanametha, Wibool; Park, Yong-Hwa; Hofmann, Ulrich; Senger, Frank; Janes, Joachim; Mallas, Christian; Stenchly, Vanessa; von Wantoch, Thomas; Quenzer, Hans-Joachim; Weiss, Manfred
- 卷第8977卷
- 印刷ISSN0277-786X
- 文件大小2109.51KB
- 发表时间2014
- DOI10.1117/12.2038249