Reaction mechanism of polymer removal using wet ozone
Goto, Yousuke; Angata, Yukihiro; Tsukazaki, Emi; Takahashi, Seiji; Koike, Kunihiko; Yamagishi, Tadaaki; Horibe, Hideo
- 期刊名称Japanese Journal of Applied Physics
- 作者Goto, Yousuke; Angata, Yukihiro; Tsukazaki, Emi; Takahashi, Seiji; Koike, Kunihiko; Yamagishi, Tadaaki; Horibe, Hideo
- 卷第53卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小333.42KB
- 发表时间2014-02-01
- DOI10.7567/JJAP.53.02BB04