Self-controlled fabrication of single-crystalline silicon nanobeams using conventional micromachining
- 期刊名称Nanotechnology
- 作者Mehdizadeh, Emad; Rahafrooz, Amir; Pourkamali, Siavash
- 卷第25卷
- 期第31期
- 印刷ISSN0957-4484
- 电子ISSN1361-6528
- 文件大小1709.25KB
- 发表时间2014-08-08
- DOI10.1088/0957-4484/25/31/315303
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