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Impact of process temperature on GaSb metal-oxide-semiconductor interface properties fabricated by ex-situ process

Yokoyama, Masafumi; Asakura, Yuji; Yokoyama, Haruki; Takenaka, Mitsuru; Takagi, Shinichi

期刊名称Applied Physics Letters
作者Yokoyama, Masafumi; Asakura, Yuji; Yokoyama, Haruki; Takenaka, Mitsuru; Takagi, Shinichi
卷第104卷
期第26期
印刷ISSN0003-6951
电子ISSN1077-3118
文件大小1857.38KB
发表时间2014-06-30
DOI10.1063/1.4884950