A two degrees-of-freedom piezoelectric single-crystal micromotor
- 期刊名称Journal of Applied Physics
- 作者Chen, Zhijiang; Li, Xiaotian; Liu, Guoxi; Dong, Shuxiang
- 卷第116卷
- 期第22期
- 印刷ISSN0021-8979
- 电子ISSN1089-7550
- 文件大小654.49KB
- 发表时间2014-12-14
- DOI10.1063/1.4903834
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