An Ideal MEMS Parametric Resonator Using a Tapered Comb-drive
Shmulevich, Shai; Hotzen, Inbar; Elata, David
- 期刊名称Procedia Engineering
- 作者Shmulevich, Shai; Hotzen, Inbar; Elata, David
- 卷第87卷
- 印刷ISSN1877-7058
- 文件大小427.96KB
- 发表时间2014
- DOI10.1016/j.proeng.2014.11.738
- 页码1481-1484