[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Creep in MEMS
Soma, A.; De Pasquale, G.; Saleem, M. M.
- 作者Soma, A.; De Pasquale, G.; Saleem, M. M.
- 文件大小756.78KB
- 发表时间2014
- DOI10.1109/dtip.2014.7056680
- 页码1-4