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[IEEE 2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT) - Guilin, China (2014.10.28-2014.10.31)] 2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Silicon-migration technology for MEMS-CMOS monolithic integration

[IEEE 2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT) - Guilin, China (2014.10.28-2014.10.31)] 2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Silicon-migration technology for MEMS-CMOS monolithic integration

Zeng, Fan; Wong, Man

作者Zeng, Fan; Wong, Man
文件大小3952.63KB
发表时间2014
DOI10.1109/icsict.2014.7021216
页码1-4

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