Practical precursor aspects for electron beam induced deposition
- 期刊名称Nanofabrication
- 作者Mulders, J.J.L.
- 卷第1卷
- 期第1期
- 电子ISSN2299-680X
- 文件大小449.17KB
- 发表时间2014-01-7
- DOI10.2478/nanofab-2014-0007
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