SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Optical Micro- and Nanometrology V - Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function
Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang; Baranski, Maciej; Perrin, Stephane; Passilly, Nicolas; Froehly, Luc; Bargiel, Sylwester; Albero, Jorge; Gorecki, Christophe
- 作者Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang; Baranski, Maciej; Perrin, Stephane; Passilly, Nicolas; Froehly, Luc; Bargiel, Sylwester; Albero, Jorge; Gorecki, Christophe
- 卷第9132卷
- 印刷ISSN0277-786X
- 文件大小586.62KB
- 发表时间2014
- DOI10.1117/12.2051122