[IEEE 2014 Joint IEEE International Symposium on the Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM) - State College, PA, USA (2014.5.12-2014.5.16)] 2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy - Residual stress measurement of the ground wafer by Raman spectroscopy
Jinglong, Sun; Fei, Qin; Chao, Ren; Zhongkang, Wang; Liang, Tang
- 作者Jinglong, Sun; Fei, Qin; Chao, Ren; Zhongkang, Wang; Liang, Tang
- 文件大小338.02KB
- 发表时间2014
- DOI10.1109/isaf.2014.6917994
- 页码867-870