SPIE Proceedings [SPIE SPIE BiOS - San Francisco, California, United States (Saturday 1 February 2014)] Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI - Focused beam scatterometry for deep subwavelength metrology
Brown, Thomas G.; Cogswell, Carol J.; Wilson, Tony; Brown, Thomas G.; Alonso, Miguel A.; Vella, Anthony; Theisen, Michael J.; Head, Stephen T.; Gillmer, Steven R.; Ellis, Jonathan D.
- 作者Brown, Thomas G.; Cogswell, Carol J.; Wilson, Tony; Brown, Thomas G.; Alonso, Miguel A.; Vella, Anthony; Theisen, Michael J.; Head, Stephen T.; Gillmer, Steven R.; Ellis, Jonathan D.
- 卷第8949卷
- 印刷ISSN0277-786X
- 文件大小610.52KB
- 发表时间2014
- DOI10.1117/12.2045651