Layered Structure of Sputter Deposited Indium Zinc Oxide Films
- 期刊名称Journal of the Japan Institute of Metals and Materials
- 作者Echigoya, Jun-ichi; Segawa, Akio; Yamazaki, Shiho; Hayasaka, Yuichiro
- 卷第78卷
- 期第2期
- 印刷ISSN0021-4876
- 电子ISSN1880-6880
- 文件大小8405.69KB
- 发表时间2014
- DOI10.2320/jinstmet.j2013051
- 页码82-89
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