Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing
- 期刊名称Journal of Nanotechnology
- 作者Miyake, Shojiro; Wang, Mei; Kim, Jongduk
- 卷第2014卷
- 印刷ISSN1687-9503
- 电子ISSN1687-9511
- 文件大小10598.83KB
- 发表时间2014
- DOI10.1155/2014/102404
- 页码1-19
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