Fabrication of gated nano electron source for vacuum nanoelectronics
Nagao, Masayoshi; Yoshida, Tomoya
- 期刊名称Microelectronic Engineering
- 作者Nagao, Masayoshi; Yoshida, Tomoya
- 卷第132卷
- 印刷ISSN0167-9317
- 文件大小2360.80KB
- 发表时间2015-01
- DOI10.1016/j.mee.2014.09.004
- 页码14-20