Fabrication of two-gimbal Ni–Fe torsional micro-gyroscope by SU-8 based UV-LIGA process
- 期刊名称Microsystem Technologies
- 作者Jain, Ankush; Shekhar, Chandra; Gopal, Ram
- 卷第21卷
- 期第7期
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小1235.13KB
- 发表时间2015-7
- DOI10.1007/s00542-014-2268-7
- 页码1479-1487
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