Effects of an additional magnetic field in ITO thin film deposition by magnetron sputtering
- 期刊名称Ceramics International
- 作者Chan Heo, Kyong; Sohn, Youngku; Seog Gwag, Jin
- 卷第41卷
- 期第1期
- 印刷ISSN0272-8842
- 文件大小1362.19KB
- 发表时间2015-01
- DOI10.1016/j.ceramint.2014.08.111
- 页码617-621
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