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The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants

The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants

Park, J.; Jung, Tae-Hoon; Lee, Jung-Hoon; Kim, Hyun-Suk; Park, Jin-Seong

期刊名称Ceramics International
作者Park, J.; Jung, Tae-Hoon; Lee, Jung-Hoon; Kim, Hyun-Suk; Park, Jin-Seong
卷第41卷
期第1期
印刷ISSN0272-8842
文件大小1521.48KB
发表时间2015-01
DOI10.1016/j.ceramint.2014.09.133
页码1839-1845

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