High aspect ratio iridescent three-dimensional metal–insulator–metal capacitors using atomic layer deposition
Burke, Micheal; Blake, Alan; Djara, Vladimir; O'Connell, Dan; Povey, Ian M.; Cherkaoui, Karim; Monaghan, Scott; Scully, Jim; Murphy, Richard; Hurley, Paul K.; Pemble, Martyn E.; Quinn, Aidan J.
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Burke, Micheal; Blake, Alan; Djara, Vladimir; O'Connell, Dan; Povey, Ian M.; Cherkaoui, Karim; Monaghan, Scott; Scully, Jim; Murphy, Richard; Hurley, Paul K.; Pemble, Martyn E.; Quinn, Aidan J.
- 卷第33卷
- 期第1期
- 印刷ISSN0734-2101
- 电子ISSN1520-8559
- 文件大小1166.13KB
- 发表时间2015-01
- DOI10.1116/1.4891319