![Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system]()
Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering systemEkpe, Samuel D.; Jimenez, Francisco J.; Field, David J.; Davis, Martin J.; Dew, Steven K. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2009