The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
- 期刊名称Plasma Sources Science and Technology
- 作者Schulze, J; Donkó, Z; Derzsi, A; Korolov, I; Schuengel, E
- 卷第24卷
- 期第1期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小3321.66KB
- 发表时间2015-02-01
- DOI10.1088/0963-0252/24/1/015019
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