Terahertz Photoacoustic Spectroscopy Using an MEMS Cantilever Sensor
- 期刊名称Journal of Microelectromechanical Systems
- 作者Glauvitz, Nathan E.; Coutu, Ronald A.; Medvedev, Ivan R.; Petkie, Douglas T.
- 卷第24卷
- 期第1期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小1670.81KB
- 发表时间2015-2
- DOI10.1109/JMEMS.2014.2327916
- 页码216-223
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