Effect of deposition atmosphere on the phase composition and microstructure of silicon carbide films prepared by laser chemical vapour deposition
- 期刊名称Ceramics International
- 作者Hashimoto, Ryuma; Ito, Akihiko; Goto, Takashi
- 卷第41卷
- 期第5期
- 印刷ISSN0272-8842
- 文件大小835.76KB
- 发表时间2015-06
- DOI10.1016/j.ceramint.2015.01.142
- 页码6898-6904
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