Oxidation of sputtered metallic Sn thin films using N 2 atmospheric pressure plasma jets
- 期刊名称Materials Research Express
- 作者Lin, Guan-Wei; Jiang, Yu-Hao; Kao, Peng-Kai; Chiu, I-Chung; Wu, Yu-Han; Hsu, Cheng-Che; Cheng, I-Chun; Chen, Jian-Zhang
- 卷第2卷
- 期第1期
- 电子ISSN2053-1591
- 文件大小577.08KB
- 发表时间2015-01-02
- DOI10.1088/2053-1591/2/1/016504
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