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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hollow MEMS mass sensors for real-time particles weighing and sizing from a few 10 nm to the μm scale

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hollow MEMS mass sensors for real-time particles weighing and sizing from a few 10 nm to the μm scale

Hadji, Celine; Berthet, Clement; Baleras, Francois; Cochet, Martine; Icard, Beatrice; Agache, Vincent
  • 作者Hadji, Celine; Berthet, Clement; Baleras, Francois; Cochet, Martine; Icard, Beatrice; Agache, Vincent
  • 文件大小1387.66KB
  • 发表时间2015
  • DOI10.1109/memsys.2015.7050916
  • 页码180-183
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