[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum
- 作者Hayashi, Hideki; Toda, Masaya; Ono, Takahito
- 文件大小5788.23KB
- 发表时间2015
- DOI10.1109/MEMSYS.2015.7050959
- 页码344-347
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