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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - 3D morphology reconstruction of high aspect ratio MEMS structure by using autofluorescence of Parylene C

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - 3D morphology reconstruction of high aspect ratio MEMS structure by using autofluorescence of Parylene C

Zhang, Lingqian; Liu, Yaoping; Yang, Fang; Wang, Wei; Zhang, Dacheng; Li, Zhihong
  • 作者Zhang, Lingqian; Liu, Yaoping; Yang, Fang; Wang, Wei; Zhang, Dacheng; Li, Zhihong
  • 文件大小4314.88KB
  • 发表时间2015
  • DOI10.1109/MEMSYS.2015.7050963
  • 页码358-360
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