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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Bonding-friendly pcPDMS: Depositing Parylene C into PDMS matrix at an elevated temperature

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Bonding-friendly pcPDMS: Depositing Parylene C into PDMS matrix at an elevated temperature

Liu, Yaoping; Zhang, Lingqian; Wang, Wei; Wu, Wengang

作者Liu, Yaoping; Zhang, Lingqian; Wang, Wei; Wu, Wengang
文件大小1182.03KB
发表时间2015
DOI10.1109/MEMSYS.2015.7050992
页码467-469

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