Third-Order Intermodulation of an MEMS Clamped-Clamped Beam Capacitive Power Sensor Based on GaAs Technology
- 期刊名称IEEE Sensors Journal
- 作者Han, Juzheng; Liao, Xiaoping
- 卷第15卷
- 期第7期
- 印刷ISSN1530-437X
- 电子ISSN1558-1748
- 文件大小970.50KB
- 发表时间2015-7
- DOI10.1109/JSEN.2015.2424997
- 页码3645-3646
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